Design, Modelling, and Simulation analysis of a Single Axis MEMS-based Capacitive Accelerometer
How to Cite?
Veena. S, Newton Rai, H.L. Suresh, Veda Sandeep Nagaraja, "Design, Modelling, and Simulation analysis of a Single Axis MEMS-based Capacitive Accelerometer," International Journal of Engineering Trends and Technology, vol. 69, no. 10, pp. 82-88, 2021. Crossref, https://doi.org/10.14445/22315381/IJETT-V69I10P211
This paper presents the design, simulation, and analytical modeling of the single proposed axis MEMSbased capacitive accelerometer. Analytical modeling has been done for frequency and displacement sensitivity. The performance of the accelerometer was tested for both static and dynamic conditions, and the corresponding static capacitance value was calculated and was found to be C0=0.730455pF, a response time of 95.17?s, and settling time of 7.261ms and the displacement sensitivity Sd= 3.5362* m/g. It was observed that the sensitivity of the accelerometer depends on its design parameters like beam length, overlap area of comb, sensing mass, and the number of interdigital fingers. A novel capacitive accelerometer has been designed for an operating frequency of 2.1kHz The accelerometer was designed using COMSOL Multiphysics and analyzed using the MATLAB simulator tool. The single proposed axis MEMS-based capacitive accelerometer is suitable for automobile applications such as airbag deployment and navigation.
single axis, Comb drive MEMS accelerometer.
 Yogesh Padmanabhan, mems based capacitive accelerometer for navigation, 2017/04/20 DOI10.13140/RG.2.2.35625.49769
 MEMS Accelerometer Specifications and Their Impact in Inertial Applications Master of Applied Science 2017 Kei-Ming Kwong Department of Electrical and Computer EngineeringUniversity of Toronto
 Stephen D. Senturia, Microsystem Design; ISBN 0-7923-7246-8; Publisher: Kluwer Academic Publishers; 2001.
 Kannan, Akila., Design and modeling of a MEMS-based accelerometer with pull in analysis. (2008).
 J. Willis and B. D. Jimerson, A piezoelectric accelerometer pp.871- 872, July 1964, doi: 10.1109/PROC.1964.3163.
 James T.Suminto, A Simple High Performance Piezoresistive Accelerometer, 1991, pp-104.
 Gao R.,Zhang L., Micromachined microsensors for manufacturing, 2004, 1094-6969.
 Amini, Babak Vakili. A Mixed-Signal Low-Noise Sigma-Delta Interface IC for Integrated Sub-Micro-Gravity Capacitive SOI Accelerometers. (2006).
 Waichi, Wong Duo, Formulation of stiffness constant and effective mass for a folded beam. (2010).
 T. Chawla, M. Kaur and G. Singh, Design and sensitivity analysis of MEMS 3D capacitive type accelerometer, Pune, (2015) 965-970, doi: 10.1109/IIC.2015.7150884.
 Badr, M.F. Modeling and Simulation of the Analogous Mechanical and Electrical Systems(2017).
 Sharma, Kanchan &Macwan, Isaac & Zhang, Linfeng&Hmurick, Lawrence &Xiong, Xingguo. Design optimization of MEMS comb accelerometer(2008)s.
 P. Singh, P. Srivastava, R. K. Chaudhary and P. Gupta, Effect of different proof mass supports on accelerometer sensitivity, (2013) 896-900, doi: 10.1109/ICEETS.2013.6533506..
 Zhang, Gang., Design and Simulation of a CMOS-MEMS Accelerometer. May (1998).
 Hrairi, Meftah&Baharom, Badrul. Design and modelling of silicon MEMS accelerometer(2013). 10.1504/IJESMS.2013.056693.
 Liu, Xiaowei, Haifeng Zhang, Guang-ming Li, Weiping Chen and Xilian Wang, Design of Readout Circuits Used for Micro-machined Capacitive Accelerometer. (2007) 537-541.
 Xie, Huikai&Fedder, Gary, Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS(2002). 10.1016/S0924- 4247(01)00740-3.
 Benmessaoud, Mourad &MekkakiaMaaza, Nasreddine. Optimization of MEMS capacitive accelerometer. Microsystem Technologies(2013). 19. 10.1007/s00542-013-1741-z.
 Gupta V, Mukherjee T, Layout synthesis of CMOS MEMS accelerometers(2012). PA-15213
 V. S. Nagaraja, K. J. Rudresha and S. L. Pinjare, Design, Fabrication and Characterization of a Biologically Inspired MEMS Directional Microphone, 2018 IEEE SENSORS, New Delhi, (2018), pp. 1-4, doi: 10.1109/ICSENS.2018.8630304.
 Rao, Kang & Wei, Xiaoli& Zhang, Shaolin & Zhang, Mengqi& Hu, Chenyuan& Liu, Huafeng& Tu, Liang-Cheng. (2019). micromachines A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process. Micromachines. 10. 380. 10.3390/mi10060380.
 Sharma K, Macwan IG, Zhang L, Hmurcik L, Xiong X (2012) Design optimization of MEMS comb accelerometer. Department of electrical and computer engineering, University of Bridgeport, Bridgeport, CT 06604
 W. Zhou, Y. Chen, B. Peng, H. Yang, H. Yu, H. Liu, and X. He., Air Damping Analysis in Comb Microaccelerometer, Advances in Mechanical Engineering, 6(2014). doi:10.1155/2014/373172
 V.C.Jayanetti, &Jayathilaka, W. A. D. M. &Talawatta, Kishan&Amarasinghe, Ranjith., Design and Simulation of a MEMS Based Dual Axis Capacitive Accelerometer(2015). 10.1109/MERCon.2015.7112344.