IJBTT

Modelling and Analysis of ZnO Piezoelectric-Based Circular Diaphragm Pressure Sensor

Modelling and Analysis of ZnO Piezoelectric-Based Circular Diaphragm Pressure Sensor
	© 2023 by IJETT Journal
	Volume-71 Issue-11
	Year of Publication : 2023
	Author : Moirangthem Shamjit Singh, Pradip Kumar Kalita, Heisnam Shanjit Singh, Maibam Sanju Meetei
	DOI : 10.14445/22315381/IJETT-V71I11P208

How to Cite?

Moirangthem Shamjit Singh, Pradip Kumar Kalita, Heisnam Shanjit Singh, Maibam Sanju Meetei, "Modelling and Analysis of ZnO Piezoelectric-Based Circular Diaphragm Pressure Sensor," International Journal of Engineering Trends and Technology, vol. 71, no. 11, pp. 84-89, 2023. Crossref, https://doi.org/10.14445/22315381/IJETT-V71I11P208

Abstract
This paper illustrates the mathematical model and simulation of a ZnO piezoelectric-based circular diaphragm pressure sensor. The load stress analytical model and stress-voltage model of the sensor are described in the mathematical model in this study. The various parameters influencing the sensor's developed stress and output voltage are discussed. Among the various piezoelectric materials, namely PZT, PVDF, PMN-PT, LiNbO3, AlN, and ZnO used for designing piezoelectric-based sensors, ZnO is adopted in this study as it has a high piezoelectric voltage coefficient with a value of -4.85x10-2 Vm/N. For the purpose of validating the analytical model, simulations of the 3D model sensor are performed using the COMSOL Multiphysics Simulator. The output characteristics of the sensor are found linearly with applied pressure and with a negative slope during the validation of the analytical model using the simulated values. The negative charge is generated at the place where tensile stress is developed, and the positive charge is generated at the place where compressive stress is developed, as found in this work. It is shown that nearly equal sensitivities of the mathematical model and simulated model of the proposed sensors are respectively detected at -3.552 mV/kPa and -3.426 mV/kPa.

Keywords
Charge, Linear, Meshing, Sensitivity, Stress.

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