Frequency Characteristics of a Micro Electromechanical Gyroscope under Temperature Variations

Frequency Characteristics of a Micro Electromechanical Gyroscope under Temperature Variations
  IJETT-book-cover           
  
© 2023 by IJETT Journal
Volume-71 Issue-9
Year of Publication : 2023
Author : Thuan-Hoang Tran, Quang-Vinh Nguyen, Van-Hao Lo, Tamara G. Nesterenko, Hanh C. Nguyen
DOI : 10.14445/22315381/IJETT-V71I9P217

How to Cite?

Thuan-Hoang Tran, Quang-Vinh Nguyen, Van-Hao Lo, Tamara G. Nesterenko, Hanh C. Nguyen, "Frequency Characteristics of a Micro Electromechanical Gyroscope under Temperature Variations," International Journal of Engineering Trends and Technology, vol. 71, no. 9, pp. 178-185, 2023. Crossref, https://doi.org/10.14445/22315381/IJETT-V71I9P217

Abstract
The microelectromechanical (MEMS) gyroscope is designed as a vibrating gyroscope and consists of inertial masses supported by spring suspension over a glass substrate. The gyroscope has two channels of operation, which correspond to two modes: the driving mode and the sensitivity mode. The silicon-sensitive element of the MEMS gyroscope was designed to have natural frequencies of 12500 Hz for both the primary and secondary oscillations, with a frequency mismatch between them of no more than 10 Hz. This ensures that the gyroscope can accurately detect and measure rotational motion. To test the gyroscope, the sensitive element was packed in a case under a pressure of 10-2 Pa and subjected to varying temperatures to determine the temperature coefficients of change in the natural frequency of the primary and secondary oscillations. The temperature coefficients of change in the natural frequency of the primary and secondary oscillations were found to be 1.61 Hz/°C and 1.31 Hz/°C, respectively. This means that for every degree Celsius increase in temperature, the natural frequencies of the primary and secondary oscillations will change by those amounts. The testing results revealed that at a temperature of 20°C, the natural frequency of the primary oscillations was 12585 kHz, while the natural frequency of the secondary oscillations was 12609 kHz. These values are important for interpreting the output signals of the MEMS gyroscope and designing systems that use the gyroscope as a sensor.

Keywords
MEMS gyroscope, Natural frequency, Temperature coefficient, Rotational motion, Inertial masses.

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