Material and Performance Analysis of MEMS Piezoresistive Pressure Sensor
|International Journal of Engineering Trends and Technology (IJETT)||
|© 2016 by IJETT Journal|
|Year of Publication : 2016|
|Authors : Tamim Al Mahruz, Rezwan Matin, Fahim Bin Wahid,Tuhin Dev
|DOI : 10.14445/22315381/IJETT-V31P202|
Tamim Al Mahruz, Rezwan Matin, Fahim Bin Wahid,Tuhin Dev "Material and Performance Analysis of MEMS Piezoresistive Pressure Sensor", International Journal of Engineering Trends and Technology (IJETT), V31(1),10-14 January 2016. ISSN:2231-5381. www.ijettjournal.org. published by seventh sense research group
This work focuses on MEMS piezoresistive pressure sensor. The sensor was simulated in COMSOL Multiphysics v4.4. The Motorola MPX100 series sensor was studied. Applied pressure range is varied from 0 to 100 kPa. To gain the optimum output, different combination of material for diaphragm & piezoresistor have been studied and corresponding displacement change, shear stress distribution and output voltage have been shown. Sensitivity of the sensor was also calculated for different combination of materials. Impact of doping concentration on output voltage for both diaphragm & piezoresistor material has also been studied.
 “An introduction to MEMS (micro-electromechanical systems),” Prime Faraday Technology Watch, January 2002.
 Tu Xiang-Zheng, Li Yun-Yan, “Silicon diaphragm piezoresistive pressure sensor and fabrication method of the same, ” Grant Publication, 1993.
 Lynch, J., Partidge, A., Law, “Design of piezoresistive MEMS-based accelerometer for integration with wireless sensing unit for structural monitoring,” J.Aersosp. Eng.,16(3), pp. 108-114, 2003.
 Eddy , David S , “Applications of MEMS technology in automotive sensors and actuators,” Proc. IEEE, vol. 86, Issue 8, 1998.
 C Pranamik, H Saha , “Design optimization of a high performance silicon MEMS piezoresistive pressure sensor for biomedical applications,” J. Micromechanics and Microengineering, 2006.
 Naga Jyothi Madduri, Gopinadh Lakkoju, Bhanu Lahari Kasturi, Sravani Sravanam and Talam Satyanarayana, “Design and deformation analysis of MEMS based piezoresistive pressure sensor,” International Journal of Advances in Engineering & Technology, May, 2014.
 Smith, C.S., “Piezoresistance effect in germanium and silicon,” Physics Review, pp. 42–49, 1954.
 Kanda, Y., “Piezoresistance effect of silicon,” Sensors and Actuators A: Physical, pp. 83–91, 1991.
 Y. Kanda and A. Yasukawa, “Optimum design considerations for silicon piezoresistive pressure sensors,” Sensors and Actuators A: Physical, 1997, 62(1–3): 539–542.
 K.J Suja, G.S Kumar, “Dimension and doping concentration based noise and performance optimization of a piezoresistive MEMS pressure sensor,” Springer-Verlag Berlin Heidelberg 2014.
 Tian B, Zhao Y, Jiang Z, “The novel structure design for pressure sensors,” Sens Rev 30(4):305-313.
 Tai-Ran-Hsu, “MEMS and microsystem: design and manufacture,” Tata McGraw-Hill, New Delhi, 2000.
 Suja KJ, Chawdhuary BP, “Design and simulation of pressure sensor for ocean depth measurament,” Appl Mech Matter 313-314:666-670.
 Madhavi KY, Krishna M, Murthy CSE, “Effect of diaphragm geometry and piezoresistor dimension on the sensitivity of piezoresistive micropressure sensor using finite element analysis,” IJESE 1(9), 2013.
 K. Sakurano, H. Katoh, Y. Chun, and H. Watanabe, “Operation of a work function type SOI temperature sensor up to 250AC,” in IEEE International SOI Conference Proceedings 2007, Osaka, Japan, pp. 149–150, 2007.
 S. Timoshenko, S. Woinowsky-Krieger, “Theory of plates and shells,” McGraw-Hill, New York, 1959: 16–20.
 Chaurasia S, Chaurasia BS, “Analytical models for low pressure square diaphragm piezoresistive MEMS sensor engineering and system (SCES),” IEEE 2012, pp1-6, 2012.
 Stephen D. Senturia, “A piezoresistive pressure sensor,” in Microsystem Design, New York: Kluwer, 2002, pp. 481– 484.
MEMS, Piezoresistor, Diaphragm, Output voltage, Displacement, Doping concentration, Shear stress.