Material and Performance Analysis of MEMS Piezoresistive Pressure Sensor

  IJETT-book-cover  International Journal of Engineering Trends and Technology (IJETT)          
© 2016 by IJETT Journal
Volume-31 Number-1
Year of Publication : 2016
Authors : Tamim Al Mahruz, Rezwan Matin, Fahim Bin Wahid,Tuhin Dev
DOI :  10.14445/22315381/IJETT-V31P202


Tamim Al Mahruz, Rezwan Matin, Fahim Bin Wahid,Tuhin Dev "Material and Performance Analysis of MEMS Piezoresistive Pressure Sensor", International Journal of Engineering Trends and Technology (IJETT), V31(1),10-14 January 2016. ISSN:2231-5381. published by seventh sense research group

This work focuses on MEMS piezoresistive pressure sensor. The sensor was simulated in COMSOL Multiphysics v4.4. The Motorola MPX100 series sensor was studied. Applied pressure range is varied from 0 to 100 kPa. To gain the optimum output, different combination of material for diaphragm & piezoresistor have been studied and corresponding displacement change, shear stress distribution and output voltage have been shown. Sensitivity of the sensor was also calculated for different combination of materials. Impact of doping concentration on output voltage for both diaphragm & piezoresistor material has also been studied.


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MEMS, Piezoresistor, Diaphragm, Output voltage, Displacement, Doping concentration, Shear stress.