Design of a Microcantilever for Biosensing Applications
|International Journal of Engineering Trends and Technology (IJETT)||
|© 2017 by IJETT Journal|
|Year of Publication : 2017|
|Authors : Shilpa Nagod, S.V Halse
|DOI : 10.14445/22315381/IJETT-V52P218|
Shilpa Nagod, S.V Halse "Design of a Microcantilever for Biosensing Applications", International Journal of Engineering Trends and Technology (IJETT), V52(2),115-117 October 2017. ISSN:2231-5381. www.ijettjournal.org. published by seventh sense research group
This paper presents the design and simulation of MEMS Microcantilever that is made up of Silicon Nitride coated with gold which is largely used for Biosensing applications. Here in, a simple microcantilever is designed and its simulation results are analysed to study stress, displacement, Eigen Frequency using Comsol Multiphysics.
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MEMS, Eigen Frequency, Microcantilever, Stress.