Optimization of Geometry of Microfabricated Piezoelectric Actuator

  ijett-book-cover  International Journal of Engineering Trends and Technology (IJETT)          
© 2013 by IJETT Journal
Volume-4 Issue-4                       
Year of Publication : 2013
Authors : Souvik Sutradhar


Souvik Sutradhar. "Optimization of Geometry of Microfabricated Piezoelectric Actuator". International Journal of Engineering Trends and Technology (IJETT). V4(4):580-585 Apr 2013. ISSN:2231-5381. www.ijettjournal.org. published by seventh sense research group


This paper focuses on optimization of the geometry of piezoelectric actuator for maximization of output for applications such as micro - pump. The device structure consists of a piezoelectric disk/plate which is glued on the top of a silicon plate. Under various constraints the displacement or deflection of the silicon plate attached to the piezoelectric material plate is obtained from simulation and used for the analysis. For analysis purpos e a circular and a square shaped silicon plate/membrane has been taken separately into consideration which are simulated under various size, shape and input excitations and the results are compared to determine the optim um dimension. For a 5 mm diameter/edge length silicon plate, the optimum diameter of circular PZT plate obtained is 4.6 mm , whereas, it is 4.1 mm edge length for square PZT plate .


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PZT , plate , displacement, actuator.