Design of three layer U-shaped MEMS piezoresistive cantilever Using COMSOL Multiphysics
|International Journal of Engineering Trends and Technology (IJETT)||
|© 2019 by IJETT Journal|
|Year of Publication : 2019|
|Authors : K. Durga Aparna, D.V.Rama Koti Reddy , B.Rajesh Kumar
|DOI : 10.14445/22315381/IJETT-V67I9P206|
MLA Style: K. Durga Aparna, D.V.Rama Koti Reddy , B.Rajesh Kumar "Design of three layer U-shaped MEMS piezoresistive cantilever Using COMSOL Multiphysics" International Journal of Engineering Trends and Technology 67.9 (2019):38-43.
APA Style:K. Durga Aparna, D.V.Rama Koti Reddy , B.Rajesh Kumar. Design of three layer U-shaped MEMS piezoresistive cantilever Using COMSOL Multiphysics International Journal of Engineering Trends and Technology, 67(9), 38-43.
This paper presents the design of three layer U shaped Piezoresistive cantilever to produce enhanced sensitivity with insulation layers on both sides of cantilevers. The analytical simulation of design is done by FEM (COMSOL MULTIPHYSICS). Micro cantilevers can detect mass either in static or dynamic mode. The effect of change in length, width and thickness are studied and it is observed that the sensitivity and stiffness are increasing when compared with the conventional rectangular cantilever.
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MEMS, COMSOL, Three layer, U shape, Piezoresistive.