Three-Axis Tunneling Micro accelerometer Based on Self-Organizing Structures
|International Journal of Engineering Trends and Technology (IJETT)||
|© 2020 by IJETT Journal|
|Year of Publication : 2020|
|Authors : I.E. Lysenko, M.A. Denisenko, A.S. Isaeva, V.D. Popov
|DOI : 10.14445/22315381/IJETT-V68I11P212|
MLA Style: I.E. Lysenko, M.A. Denisenko, A.S. Isaeva, V.D. Popov "Three-Axis Tunneling Micro accelerometer Based on Self-Organizing Structures" International Journal of Engineering Trends and Technology 68.11(2020):92-96.
APA Style:I.E. Lysenko, M.A. Denisenko, A.S. Isaeva, V.D. Popov. Three-Axis Tunneling Micro accelerometer Based on Self-Organizing Structures International Journal of Engineering Trends and Technology, 68(11),92-96.
The paper presents the design and manufacturing technology of a three-axis integral micromechanical tunnel-type accelerometer. The technological features of the controlled self-organization of mechanically stressed semiconductor GaAs / InAs layers for fabricating MEMS sensor structures are considered. The principle of operation of the tunnel accelerometer is presented. The proposed design was modeled and optimized using ANSYS CAD. The obtained simulation results can be used to develop high-tech precision three-axis MEMS linear acceleration sensors.
 V. Kumar, X.-B. Guo, and S. Pourkamali, Single-mask field emission based tunable MEMS tunneling accelerometer, in Proceedings of the 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO), Rome, Italy, 27–30 (2015). IEEE, (2015) 1171–1174.
 E. Mounier, and D. Damianos, Status of the MEMS Industry, in Market and Technology Report-Sample. Lyon, France: Yole Development. (2019) 1–47.
 I.E., Lysenko, The results of modeling of a micromechanical accelerometer, Journal of Physics: Conference Series. 1410, 012226, 2019. DOI: 10.1088/1742-6596/1410/1/012226
 J. Fraden, Handbook of Modern Sensors: Physics, Designs, and Applications, 5th ed. Cham, Switzerland: Springer International Publishing. (2016) 758
 E. Boyden, O. El Rifai, B. Hubert, M. Karpman, and D. Roberts, A High-Performance Tunneling Accelerometer, MIT Term Project Paper 6.777, Introduction to Microelectromechanical Systems, Spring 1999.
 M.A. Denisenko, B.G. Konoplev, A.S. Isaeva, and I.E., Lysenko, Integrated micro-mechanical tunneling accelerometer, Journal of Pharmaceutical Science and Research. 9(11) (2017) 2155-2158.
 V.Ya. Prinz, Precise semiconductor nanotubes and nanoshells fabricated on (110) and (111) Si and GaAs,, Physica E Low-dimensional Systems and Nanostructures (PHYSICA E). 23(3-4) (2014) 260-268.
 M.A. Denisenko, and A.S. Isaeva, Integral micromechanical tunneling accelerometer based on controlled self-organization of mechanically stressed semiconductor layers, Izvestia SFedU. Technical science, 2(196) (2018) 25-33.
 E.A. Ryndin, and NK. Pristupchik, Integrated Micromechanical Tunneling Accelerometer Based on Driven Self-Assembly of Strained GaAs/InAs Layers, Izvestiya SFEDU. Engineering Sciences. 1(90) (2009) 129–134.
microelectromechanical system, linear acceleration sensor, accelerometer, tunnel effect, MEMS.